Carrier-mediated ferromagnetism in p-Si(100) by sequential ion-implantation of B and Mn
Аннотация
Ferromagnetic Si1−xMnx was prepared by implanting B+ and Mn+ ions in sequence into p-type Si(100) at room temperature and post-annealing at 700–900 °C. Superparamagnetic nano-sized silicide precipitates, 10–27 at.% Mn, were found near the surface of all Si1−xMnx samples. Annealing at 800 °C or below leads to the formation of a thin Si(Mn) layer, with 1.1 at.% Mn, ~180 nm beneath the surface, giving rise to ferromagnetism with a Curie temperature above 250 K. The high-temperature ferromagnetism is attributed to the indirect exchange mediated by localized carriers in the impurity states. The Mn content of 1–1.5 at.%, having been separately reported to show room-temperature ferromagnetism several times by different groups, seems meaningful for Si-based diluted magnetic semiconductors (DMS). Possible extensions of our work presented here are elucidated.
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