Theory of the recoil implantation
Yu. F. BlinovMicroelectronic and Electronic Engineering Department, V. D. Kalmykov Radiotechnical Institute, TaganrogP. V. SerbaMicroelectronic and Electronic Engineering Department, V. D. Kalmykov Radiotechnical Institute, Taganrog
ABI
Аннотация
A diffusion theory is proposed for the description of the recoil implantation process. Diffusion coefficient calculations taking into account of recoil atom interaction with projectile ions and cascade atoms, are considered. The dependence of the diffusion coefficient on the projectile ion mass and energy is analyzed. It is shown that the general role in the stimulation of recoil migration is caused by the cascade processes. [Russian Text Ignored].
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