Use of a two-wire microwave line at the boundary of the investigated zone to measure the electron density in a low-temperature plasma
A. D. ZuevA. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, St. PetersburgAndrey G. SmolinA. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, St. Petersburg
ABI
Аннотация
A new method based on a two-wire line has been developed for noncontact diagnostics of a low-temperature plasma and its fluxes in channels with complex profiles. This method provides good spatial and time resolution.
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