Ion-induced sputtering of a metal in the form of large clusters
V. I. MatveevDepartment of Thermal Physics, Uzbekistan Academy of Sciences, 700135, Tashkent, UzbekistanS.F. BelykhInstitute of Electronics, Academy of Sciences of the Republic of Uzbekistan, 700143, Tashkent, UzbekistanI. V. BerevkinInstitute of Electronics, Academy of Sciences of the Republic of Uzbekistan, 700143, Tashkent, Uzbekistan
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Аннотация
A model is proposed for the ion-induced sputtering of a metal in the form of large clusters with a number of atoms N⩾5. The model is based on simple physical assumptions and is consistent with experiment. As an example, calculations are made of the relative cluster yield as a function of the number of atoms in the cluster as a result of the bombardment of various metals by singly charged 5 keV argon ions. A comparison is made with experimental data.
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