Analysis of the process of Emf and current generation in Si/Si film structures obtained by vacuum deposition
Samad NimatovTashkent state technical university named after Islam Karimov, Tashkent, UzbekistanХ. Б. АшуровArifov Institute of ion plasma and laser technologies, Academy of Sciences of the Republic of Uzbekistan, Tashkent, UzbekistanSherzod KuchkanovTashkent state technical university named after Islam Karimov, Tashkent, UzbekistanС. Е. МаксимовArifov Institute of ion plasma and laser technologies, Academy of Sciences of the Republic of Uzbekistan, Tashkent, UzbekistanAlmukhan NuraliyevTashkent state technical university named after Islam Karimov, Tashkent, UzbekistanDoniyor GafurovTashkent state technical university named after Islam Karimov, Tashkent, Uzbekistan
ABI
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