D. V. Shengurov

1 ta ish

Fizika-Texnika Instituti

1. Polycrystalline silicon films doped with aluminum during deposition

   D. V. Shengurov

   MaqolaThin-Film Transistor TechnologiesTechnical Physics Letters19970 iqtibos

   ABIABI:AkademIndex/1997.article.000214