L. Sansonnens

1 ta ish

Swiss Federal Institute of Technology in Lausanne

1. Improving plasma uniformity using lens-shaped electrodes in a large area very high frequency reactor

   Harald Schmidt, L. Sansonnens, A.A. Howling +3

   Maqola20042 iqtibos

   ABIABI:AkademIndex/2026.other.418072