Eugene Kats

1 ta ish

TOSHKENT TO'QIMACHILIK VA YENGIL SANOAT INSTITUTI

1. Atomic Layer Deposition of Ultra-Thin Oxide Semiconductors: Challenges and Opportunities

   Serge Zhuiykov, Zhenyin Hai, Eugene Kats +2

   MaqolaSemiconductor materials and devicesKey engineering materials20170 iqtibos

   ABIABI:AkademIndex/2017.article.000336