De‐Qi Wen

1 ta ish

University of California, Berkeley

1. Effect of a dielectric layer on plasma uniformity in high frequency electronegative capacitive discharges

   Emi Kawamura, De‐Qi Wen, M. A. Lieberman +1

   Maqola20172 iqtibos

   ABIABI:AkademIndex/2026.other.418075