Umirzakov B.E.

1 ta ish

Islom Karimov nomidagi Toshkent davlat texnika universiteti

1. Influence of preliminary ion bombardment on the formation of Co and CoSi-=SUB=-2-=/SUB=- nanofilms on Si surface during solid-phase deposition

   Turapov I. Kh., I. R. Bekpulatov, A. Q. Tashatov +1

   MaqolaOAOchiq kirishIon-surface interactions and analysisПисьма в журнал технической физики20223 iqtibos

   ABIABI:AkademIndex/2026.other.402221