D. V. Shengurov

1 ta ish

Scientific-Research Physicotechnical Institute, Nizhnii Novgorod State University, Nizhnii Novgorod

1. Polycrystalline silicon films doped with aluminum during deposition

   D. V. Shengurov

   MaqolaThin-Film Transistor TechnologiesTechnical Physics Letters19970 iqtibos

   ABIABI:AkademIndex/openalex/1997.article.000214