E.U. Boltaev

1 ta ish

Tashkent State Technical University, University Str. 2, 700095 Tashkent, Uzbekistan

1. Obtaining of epitaxial films of metal silicides by ion implantation and molecular beam epitaxy

   Б. Е. Умирзаков, Д. А. Ташмухамедова, E.U. Boltaev +1

   MaqolaSemiconductor materials and interfacesMaterials Science and Engineering B200314 iqtibos

   ABIABI:AkademIndex/openalex/2003.article.000028