M. A. Gan

1 ta ish

NPK S. I. Vavilov State Optical Institute, St. Petersburg

1. Prospects for the development of optical systems for nanolithography

   А. Б. Бельский, M. A. Gan, I. A. Mironov +1

   MaqolaAdvancements in Photolithography TechniquesJournal of Optical Technology20090 iqtibos

   ABIABI:AkademIndex/openalex/2009.article.000086