A. S. Halmatov

1 ta ish

Institute of Ionic-Plasma and Laser Technologies, Uzbekistan Аcademy of Sciences, Tashkent, 100125, Uzbekistan

1. Effect of Co+-ion implantation on the composition and properties of free Si–Cu nanofilm structures

   З. А. Исаханов, Tulkin Kodirov, A. S. Halmatov +3

   MaqolaMetal and Thin Film MechanicsJournal of Surface Investigation X-ray Synchrotron and Neutron Techniques20173 iqtibos

   ABIABI:AkademIndex/openalex/2026.other.495101