Oxygen Gettering on Buried Layers at Post-Implantation Annealing of Hydrogen Implanted Czochralski Silicon
R. JobUniversity of HagenW. R. FahrnerUniversity of HagenA. UlyashinSINTEF Materials and ChemistryYu. A. BumayА. И. ИвановIoffe Physicotechnical Institute RASL. Palmetshofer
Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomenabook series1997en
Ochiq kirish: yoʻq
ABI
Annotatsiya
Annotatsiya mavjud emas.
Mavzular
Identifikatorlar
Iqtiboslar va manbalar
0 ta iqtibos0 ta foydalanilgan manba