W. R. Fahrner

1 ta ish

University of Hagen

1. Oxygen Gettering on Buried Layers at Post-Implantation Annealing of Hydrogen Implanted Czochralski Silicon

   R. Job, W. R. Fahrner, A. Ulyashin +3

   MaqolaSilicon and Solar Cell TechnologiesDiffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena19970 iqtibos

   ABIABI:AkademIndex/1997.article.000145