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Diffusion of europium in silicon

D. É. NazyrovUlugbek National University of Uzbekistan, Tashkent, 700174, Uzbekistan
Semiconductorsjournal2003en

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The diffusion of europium in silicon has been studied for the first time in the temperature range 1100–1250°C by the direct radioactive-tracer method. The diffusion parameters of europium impurity in silicon have been established.

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