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Diffusion of terbium in silicon

D. É. NazyrovUlugbek National University of Uzbekistan, Tashkent, 700174, Uzbekistan
Semiconductorsjournal2006en

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The diffusion of terbium in silicon in the temperature range of 1100–1250°C is studied using the direct radioisotope technique for the first time. The diffusion parameters of terbium in silicon are determined.

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