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Structural characterization and electro-physical properties for SiOC(–H) low-k dielectric films

A. S. ZakirovHeat Physics Department, Uzbek Academy of Sciences, Tashkent 100135, UzbekistanP. K. KhabibullaevHeat Physics Department, Uzbek Academy of Sciences, Tashkent 100135, UzbekistanChi Kyu Choi

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