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Low-field ion microscopy

V. A. KsenofontovKharkov Physicotechnical InstituteE. V. SadanovKharkov Physicotechnical InstituteO. A. VelikodnayaKharkov Physicotechnical Institute

Technical Physicsjournal2009en

Ochiq kirish: yoʻq

ABI

Annotatsiya

Experimental data on field ion emission under high partial pressures of water vapor at room temperature are reported. A method for obtaining low-field ion images in the presence of water vapor is proposed and the potentialities, limitations, and prospects of using images in microscopy are considered.

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Mavzular

Ion-surface interactions and analysis Integrated Circuits and Semiconductor Failure Analysis Advanced Electron Microscopy Techniques and Applications

Identifikatorlar

DOI: 10.1134/s1063784209040215

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