Collisionless Bounce Resonance Heating in Dual-Frequency Capacitively Coupled Plasmas
Yong-Xin LiuDalian UniversityQuan‐Zhi ZhangDalian UniversityWei JiangSchool of Physics, Huazhong University of Science and Technology, 430074 Wuhan, ChinaLu-Jing HouTheory and Complex Plasmas, MPI for Extraterrestrial Physics, Max Planck SocietyXiangzhan JiangSchool of Physics and Optoelectronic Technology, Dalian University of Technology, 116024 Dalian, ChinaWenqi LuSchool of Physics and Optoelectronic Technology, Dalian University of Technology, 116024 Dalian, ChinaYou‐Nian WangDalian University
2011en
ABI
Annotatsiya
We present the experimental evidence of the collisionless electron bounce resonance heating (BRH) in low-pressure dual-frequency capacitively coupled plasmas. In capacitively coupled plasmas at low pressures when the discharge frequency and gap satisfy a certain resonant condition, the high energy beamlike electrons can be generated by fast sheath expansion, and heated by the two sheaths coherently, thus the BRH occurs. By using a combined measurement of a floating double probe and optical emission spectroscopy, we demonstrate the effect of BRH on plasma properties, such as plasma density and light emission, especially in dual-frequency discharges.
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