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A method for analysis of low energy backscattering spectra

V. HnatowiczNuclear Physics Institute, 250 68 Řež, CzechoslovakiaJ. KvítekNuclear Physics Institute, 250 68 Řež, CzechoslovakiaLukáš PelikánTechnical University of Prague, Department of Microelectronics, Prague, CzechoslovakiaV. RybkaTesla Electronics Research Institute, 142 21 Prague, CzechoslovakiaPavel Krejčı́Tesla Electronics Research Institute, 142 21 Prague, Czechoslovakia

Nuclear Instruments and Methods in Physics Researchjournal1982en

ABI

Annotatsiya

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Mavzular

Ultrasonics and Acoustic Wave Propagation Ion-surface interactions and analysis Integrated Circuits and Semiconductor Failure Analysis

Identifikatorlar

DOI: 10.1016/0029-554x(82)90030-1

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