Investigation of Influence of Thermal and Radiation Processing on Impurity Centers in Silicon and Silicon Based Structures
M. AshurovInstitute of Nuclear Physics of Uzbekistan Academy of Sciences, Ulughbek, 702132, Tashkent, UzbekistanSh. MakhkamovInstitute of Nuclear Physics of Uzbekistan Academy of Sciences, Ulughbek, 702132, Tashkent, UzbekistanN.A. TursunovInstitute of Nuclear Physics of Uzbekistan Academy of Sciences, Ulughbek, 702132, Tashkent, UzbekistanS.V. MartynchenkoInstitute of Nuclear Physics of Uzbekistan Academy of Sciences, Ulughbek, 702132, Tashkent, Uzbekistan
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