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Characterisation of the generation of ions in electron beam evaporator for the control of metal deposition processes

A. LyutovichStaatliche Materialpruefungsanstalt (MPA) Stuttgart, University of Stuttgart, Pfaffenwaldring 32, D-70569 Stuttgart, GermanyKarl MaileStaatliche Materialpruefungsanstalt (MPA) Stuttgart, University of Stuttgart, Pfaffenwaldring 32, D-70569 Stuttgart, GermanyA. GuskoStaatliche Materialpruefungsanstalt (MPA) Stuttgart, University of Stuttgart, Pfaffenwaldring 32, D-70569 Stuttgart, GermanyХ. Б. АшуровArifov Institute of Electronics, Uzbek Academy of Sciences, Akademgorodok, 700143 Tashkent, UzbekistanС. Н. МорозовArifov Institute of Electronics, Uzbek Academy of Sciences, Akademgorodok, 700143 Tashkent, Uzbekistan

Surface and Coatings Technologyjournal2002en

ABI

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Annotatsiya mavjud emas.

Mavzular

nanoparticles nucleation surface interactions Plasma Diagnostics and Applications Mass Spectrometry Techniques and Applications

Identifikatorlar

DOI: 10.1016/s0257-8972(01)01580-8

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