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Kinetic simulation of the 3D growth of subsurface impurity nanoclusters during cobalt deposition onto a copper surface

M. N. LubovIoffe Physicotechnical Institute, Russian Academy of Sciences, St. Petersburg, 195220, RussiaD. V. KulikovIoffe Physicotechnical Institute, Russian Academy of Sciences, St. Petersburg, 195220, RussiaO. KurnosikovEindhoven University of Technology, Eindhoven, 5600 MB, NetherlandsYu. V. TrushinIoffe Physicotechnical Institute, Russian Academy of Sciences, St. Petersburg, 195220, Russia
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A physical model of the 3D growth of a subsurface cobalt cluster during the epitaxy of cobalt atoms on a copper substrate is developed. Time dependences are established for the cobalt cluster radius and height.

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