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Properties of CrN/Mo2N nano-multilayer films synthesized by multi-cathodic arc ion plating system

Bo HanKey Laboratory of Artificial Nano- and Micro-Materials of Ministry of Education, School of Physics and Technology, Wuhan University, 430072 Wuhan, ChinaVasiliy PelenovichInstitute of Ion-Plasma and Laser Technologies, Academy of Sciences of Uzbekistan, 700135 Tashkent, UzbekistanMuhammad Imran YousafKey Laboratory of Artificial Nano- and Micro-Materials of Ministry of Education, School of Physics and Technology, Wuhan University, 430072 Wuhan, ChinaSuding YanKey Laboratory of Artificial Nano- and Micro-Materials of Ministry of Education, School of Physics and Technology, Wuhan University, 430072 Wuhan, ChinaW. WangKey Laboratory of Artificial Nano- and Micro-Materials of Ministry of Education, School of Physics and Technology, Wuhan University, 430072 Wuhan, ChinaShangru ZhouKey Laboratory of Artificial Nano- and Micro-Materials of Ministry of Education, School of Physics and Technology, Wuhan University, 430072 Wuhan, ChinaBing YangSchool of Power & Mechanical Engineering, Wuhan University, 430072 Wuhan, ChinaZhitao AiKey Laboratory of Artificial Nano- and Micro-Materials of Ministry of Education, School of Physics and Technology, Wuhan University, 430072 Wuhan, ChinaC.S. LiuKey Laboratory of Artificial Nano- and Micro-Materials of Ministry of Education, School of Physics and Technology, Wuhan University, 430072 Wuhan, ChinaDejun FuKey Laboratory of Artificial Nano- and Micro-Materials of Ministry of Education, School of Physics and Technology, Wuhan University, 430072 Wuhan, China
Thin Solid Filmsjournal2016en
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