Low Energy Ar<sup>+</sup> Ion Scattering on InGaP(001) Surface
Karimov Mukhtorjon KarimberganovichDepartment of Physics, Urgench State UniversityKutliev Uchkun OtoboyevichDepartment of Physics, Urgench State UniversityIsmailov Shavkat Ko'ziyevichOtabaev Mekhroj Uchkun o'g'liDepartment of Physics, Urgench State University
ABI
Annotatsiya
The energy and angular distributions of particles scattered Ar+ ions on the surface of InGaP(001)<110> have been calculated. The correlation between experimental and calculated angular distributions of the scattered particles has been presented. It has been shown that the semichanneled ions formed the characteristic peaks in the energy distributions of the scattered particles.
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