Synchrotron investigations of Si/Mo/Si…c-Si (100) multilayer nanoperiodic structures
É. P. DomashevskayaVoronezh State University, Universitetskaya pl. 1, Voronezh, 394006, RussiaV. A. TerekhovVoronezh State University, Universitetskaya pl. 1, Voronezh, 394006, RussiaS. Yu. TurishchevVoronezh State University, Universitetskaya pl. 1, Voronezh, 394006, RussiaD. A. KoyudaVoronezh State University, Universitetskaya pl. 1, Voronezh, 394006, RussiaN. A. RumyantsevaVoronezh State University, Universitetskaya pl. 1, Voronezh, 394006, RussiaYurii P. PershinNational Technical University “Kharkiv Polytechnic Institute”, ul. Frunze 21, Kharkiv, 61002, UkraineВ. В. КондратенкоNational Technical University “Kharkiv Polytechnic Institute”, ul. Frunze 21, Kharkiv, 61002, UkraineN. AppathuraiSynchrotron Radiation Center, 3731 Schneider Dr., Stoughton, Wisconsin, 53589-3097, USA
2013en
ABI
Annotatsiya
This paper presents the results of the investigation of c-Si/[Si/Mo] n /Si multilayer nanoperiodic structures by X-ray absorption near-edge structure (XANES) spectroscopy using synchrotron radiation. Changes in the fine structure of XANES MoL 2,3 spectra confirm the formation of the silicide phase on heterophase interfaces Si/Mo/Si due to the solid-phase interactions between silicon and molybdenum layers.
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