Correlation between the structure, specific resistance, and optical properties of ITO films grown by CVD
I. G. AtabaevPhysicotechnical Institute, Physics–Sun Scientific Production Association, Academy of Sciences of the Republic of Uzbekistan, Tashkent, 100084, UzbekistanM. U. KhazhievPhysicotechnical Institute, Physics–Sun Scientific Production Association, Academy of Sciences of the Republic of Uzbekistan, Tashkent, 100084, UzbekistanS. B. ZakirovaPhysicotechnical Institute, Physics–Sun Scientific Production Association, Academy of Sciences of the Republic of Uzbekistan, Tashkent, 100084, UzbekistanZh. Z. ShermatovPhysicotechnical Institute, Physics–Sun Scientific Production Association, Academy of Sciences of the Republic of Uzbekistan, Tashkent, 100084, Uzbekistan
ABI
Annotatsiya
By means of chemical vapor deposition (CVD) in a quasi-closed space with the use of a separate vaporizer, indium and tin oxides (ITOs)/glass structures with high conductivity and transparency and a thickness of up to 3 μm are obtained; they are suitable for the manufacture of protective coatings of mirrors with a reflecting facial layer.
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