Synergetic approach to studying material sputtering under ion bombardment
Annotatsiya
The use of the synergetic approach to studying the sputtering of materials under ion bombardment is considered. The applicability of this approach is based on complete correspondence between the main concepts of ion sputtering and synergetics, i.e., the disequilibrium and nonlinearity of multiparticle processes. The systematic application of synergetic methods within a uniform approach allow us to analyze such characteristics as the formation of mass and energy distributions (mass and energy spectra), and to develop a universal approach to studying the processes of elastic displacements and thermal spike based on the principles of nonlinear dynamics. A conclusion is drawn regarding the usefulness of the synergetic approach to the whole spectrum of problems of radiation physics.