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Features of polyatomic ion emission under sputtering of a silicon single crystal by Au− cluster ions
Sh.Dj. Akhunov, С. Н. Морозов, У. Х. Расулев
MaqolaIon-surface interactions and analysisNuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms200313 iqtibosABI