Maqola

Features of polyatomic ion emission under sputtering of a silicon single crystal by Au− cluster ions

Sh.Dj. AkhunovArifov Institute of Electronics, Akademgorodok, 700125 Tashkent, UzbekistanС. Н. МорозовArifov Institute of Electronics, Akademgorodok, 700125 Tashkent, UzbekistanУ. Х. РасулевArifov Institute of Electronics, Akademgorodok, 700125 Tashkent, Uzbekistan

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atomsjournal2003en

ABI

Annotatsiya

Annotatsiya mavjud emas.

Mavzular

Ion-surface interactions and analysis Integrated Circuits and Semiconductor Failure Analysis Diamond and Carbon-based Materials Research

Identifikatorlar

DOI: 10.1016/s0168-583x(02)02200-0

Iqtiboslar va manbalar

13 ta iqtibos 10 ta foydalanilgan manba

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