Мақола

Features of polyatomic ion emission under sputtering of a silicon single crystal by Au− cluster ions

Sh.Dj. AkhunovArifov Institute of Electronics, Akademgorodok, 700125 Tashkent, UzbekistanС. Н. МорозовArifov Institute of Electronics, Akademgorodok, 700125 Tashkent, UzbekistanУ. Х. РасулевArifov Institute of Electronics, Akademgorodok, 700125 Tashkent, Uzbekistan

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atomsjournal2003en

ABI

Аннотация

Аннотация мавжуд эмас.

Мавзулар

Ion-surface interactions and analysis Integrated Circuits and Semiconductor Failure Analysis Diamond and Carbon-based Materials Research

Идентификаторлар

DOI: 10.1016/s0168-583x(02)02200-0

Иқтибослар ва манбалар

13 та иқтибос 10 та фойдаланилган манба

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