Matteo Cocuzza

1 works

CNR-IMEM, Parco Area delle Scienze, 37a, 43124 Parma, Italy

1. Cost efficient master fabrication process on copper substrates

   Simone Luigi Marasso, Giancarlo Canavese, Matteo Cocuzza

   ArticleNanofabrication and Lithography TechniquesMicroelectronic Engineering20110 citations

   ABIABI:AkademIndex/openalex/2011.article.000087