Article

Cost efficient master fabrication process on copper substrates

Simone Luigi MarassoXlab – Materials and Microsystems Laboratory, Department of Material Science and Chemical Engineering, Polytechnic of Turin – Latemar Unit, Via Lungo Piazza d’Armi 6, 10034 Chivasso (Turin), ItalyGiancarlo CanaveseIIT (Istituto Italiano di Tecnologia) – Center for Space Human Robotics, Corso Trento 21, Torino, ItalyMatteo CocuzzaCNR-IMEM, Parco Area delle Scienze, 37a, 43124 Parma, Italy

Microelectronic Engineeringjournal2011en

ABI

Abstract

No abstract available.

Topics

Nanofabrication and Lithography Techniques Advancements in Photolithography Techniques Advanced Surface Polishing Techniques

Identifiers

DOI: 10.1016/j.mee.2011.02.023

Citations and references

Cited by 09 references

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