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Pd-Based Ohmic Contacts to LPE 4H-SiC with Improved Thermal Stability

L. Kassamakova-KolaklievaRoumen KakanakovBulgarian Academy of SciencesV. CimallaFraunhofer Institut für Angewandte FestkörperphysikN. HristevaBulgarian Academy of SciencesG. LepoevaBulgarian Academy of SciencesN.I. KuznetsovIoffe Physicotechnical Institute RASKonstantinos ZekentesFoundation for Research and Technology-Hellas(FORTH)
Materials science forumbook series2003en
ABI

Abstract

No abstract available.

Topics

Silicon Carbide Semiconductor TechnologiesSemiconductor materials and devicesCopper Interconnects and Reliability

Identifiers

DOI
10.4028/www.scientific.net/msf.433-436.713

Citations and references

Cited by 00 references
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