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Sputtering source of cluster ions and surface-ionization source of polyatomic ions of organic compounds

У. Х. РасулевArifov Institute of Electronics, Uzbek Academy of Sciences, F.Khojaeva 33, 700143 Tashkent, UzbekistanС. Н. МорозовArifov Institute of Electronics, Uzbek Academy of Sciences, F.Khojaeva 33, 700143 Tashkent, UzbekistanУ. ХасановArifov Institute of Electronics, Uzbek Academy of Sciences, F.Khojaeva 33, 700143 Tashkent, UzbekistanDilshadbek T. UsmanovArifov Institute of Electronics, Uzbek Academy of Sciences, F.Khojaeva 33, 700143 Tashkent, Uzbekistan
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