Fragmentation of sputtered Si n O+ m clusters: Release kinetic and dissociation energies
Н. Х. ДжемилевArifov Institute of Electronics, Uzbek Academy of Sciences, Tashkent, UzbekistanС. Ф. КоваленкоArifov Institute of Electronics, Uzbek Academy of Sciences, Tashkent, UzbekistanL.F. LifanovaArifov Institute of Electronics, Uzbek Academy of Sciences, Tashkent, UzbekistanС. Е. МаксимовArifov Institute of Electronics, Uzbek Academy of Sciences, Tashkent, UzbekistanШ. Т. ХожиевArifov Institute of Electronics, Uzbek Academy of Sciences, Tashkent, Uzbekistan
ABI
Abstract
The spectra of kinetic energies of positive Si n O + cluster ions (n = 2–5, m = 2–7) have been measured using a double focusing ion microanalyzer with reverse geometry at instants 10−5 to 10−4 s after emission. The dissociation energies have been determined within the evaporative ensemble model and the theory of unimolecular decay reactions. The results obtained are compared with the binding energies of neutral Si n O m clusters.
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