Self-organization of nickel atoms in silicon
М. К. БахадырхановBeruni State Technical University, Universitetskaya ul. 2, Tashkent, 100095, UzbekistanХ. М. ИлиевBeruni State Technical University, Universitetskaya ul. 2, Tashkent, 100095, UzbekistanK. S. AyupovBeruni State Technical University, Universitetskaya ul. 2, Tashkent, 100095, UzbekistanB. A. AbdurakhmonovBeruni State Technical University, Universitetskaya ul. 2, Tashkent, 100095, UzbekistanP. Yu. KrivenkoBeruni State Technical University, Universitetskaya ul. 2, Tashkent, 100095, UzbekistanR. L. KholmukhamedovBeruni State Technical University, Universitetskaya ul. 2, Tashkent, 100095, Uzbekistan
ABI
Abstract
We present experimental evidence for self-organization of nickel microparticles in silicon under certain thermodynamic conditions of nickel diffusion doping. The concentration and distribution of the microparticles in silicon are very uniform. Additional anneals lead to self-ordering of the impurity microparticles.