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Works cited by this work

12 works

Work: Low-energy P+ ion channeling and implantation into Si(110), SiC(110), GaP(110) and GaAs(110)

  1. Atomic collisions on solid surfaces

    Peter Sigmund

    Article199435 citations
    ABI
  2. Atomic collisions on solid surfaces

    E.S. Parilis

    Book199322 citations
    ABI
  3. THE STOPPING AND RANGE OF IONS IN SOLIDS

    J. F. Ziegler

    Chapter198815 citations
    ABI
  4. THE STOPPING AND RANGE OF IONS IN SOLIDS

    J. F. Ziegler

    Chapter198411 citations
    ABI
  5. Computer Simulation of Ion-Solid Interactions

    W. Eckstein

    Book19918 citations
    ABI
  6. Channeling: theory, observation and applications

    D. V. Morgan

    Book19732 citations
    ABI
  7. Ion Implantation: Equipment and Techniques

    H. Ryssel, H. Glawischnig

    Book19832 citations
    ABI
  8. Untitled

    Other1 citations
    ABI