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Works cited by this work

12 works

Work: Computer simulation of SiC and B4C sputtering by Ar+ and He+ ions bombardment

  1. Computer studies of the reflection of light ions from solids

    O.S. Oen, Mark T. Robinson

    Article19766 citations
    ABI

  2. Computer simulation of two-component target sputtering

    W. Eckstein, J.P. Biersack

    Article19854 citations
    ABI

  3. Evolve, a time-dependent monte carlo code to simulate the effects of ion-beam-induced atomic mixing

    M.L. Roush, T.D. Andreadis, O.F. Goktepe

    Article19814 citations
    ABI

  4. Tridyn-binary collision simulation of atomic collisions and dynamic composition changes in solids

    W. Möller, W. Eckstein, J.P. Biersack

    Article19883 citations
    ABI

  5. Transition layer formation simulation during film deposition by an ion-molecular beam

    T.S. Pugacheva

    ArticleIon-surface interactions and analysisRadiation Effects19873 citations
    ABI

  6. Computer simulation of ion beam penetration in amorphous target

    Y. Miyagawa, S. Miyagawa

    Article19832 citations
    ABI

  7. Light ion sputtering of low Z materials in the temperature range 20–1100°C

    J. Bohdansky, J. Roth

    Article19842 citations
    ABI

  8. Computer Simulation of Range and Damage Distributions of He ions in SiC

    Yoshiko Miyagawa, Y. Ato, Sōji Miyagawa

    Article19842 citations
    ABI

  9. Untitled

    Other1 citations
    ABI

  10. Untitled

    Other1 citations
    ABI

  11. Untitled

    Other1 citations
    ABI

  12. Untitled

    Other1 citations
    ABI