The radiation stimulated diffusion role in high dose, low energy, high temperature ion implantation
S.H. ValievThermophysics Department of Academy of Sciences of Uzbekistan, Tashkent, UzbekistanT.S. PugachevaTashkent State Technical University, Universitetskaja 2, Tashkent 700095, UzbekistanF.G. JurabekovaTashkent State Technical University, Universitetskaja 2, Tashkent 700095, UzbekistanS.A. LemTashkent State Technical University, Universitetskaja 2, Tashkent 700095, UzbekistanY. MiyagawaNational Industrial Research Institute of Nagoya, Nagoya, Japan
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atomsjournal1997en
ABI
Abstract
No abstract available.