S.A. Lem

2 works

Tashkent State Technical University, Universitetskaja 2, Tashkent 700095, Uzbekistan

1. The radiation stimulated diffusion role in high dose, low energy, high temperature ion implantation

   S.H. Valiev, T.S. Pugacheva, F.G. Jurabekova +2

   ArticleSilicon and Solar Cell TechnologiesNuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms19971 citations

   ABIABI:AkademIndex/openalex/2026.other.488712

2. The simulation of silicon doping by ion bombardment

   T.S. Pugacheva, F.G. Dzhurabekova, S.A. Lem

   ArticleIon-surface interactions and analysis19950 citations

   ABIABI:AkademIndex/openalex/1995.article.000192