D. V. Shengurov

Работ: 1

Scientific-Research Physicotechnical Institute, Nizhnii Novgorod State University, Nizhnii Novgorod

1. Polycrystalline silicon films doped with aluminum during deposition

   D. V. Shengurov

   СтатьяThin-Film Transistor TechnologiesTechnical Physics Letters1997Цитирований: 0

   ABIABI:AkademIndex/openalex/1997.article.000214