Chi Kyu Choi

Работ: 1

1. Structural characterization and electro-physical properties for SiOC(–H) low-k dielectric films

   A. S. Zakirov, P. K. Khabibullaev, Chi Kyu Choi

   СтатьяCopper Interconnects and ReliabilityPhysica B Condensed Matter2009Цитирований: 0

   ABIABI:AkademIndex/openalex/2009.article.000165