Comparison of parameters of heteroepitaxial structures
A. K. TashatovKarshi Engineering and Economics Institute, Mustakillik 225, Karshi, Kashkadarya region, 180100, UzbekistanRumiya BeytullayevaKarshi Engineering and Economics Institute, Mustakillik 225, Karshi, Kashkadarya region, 180100, UzbekistanT T UngbayevichKarshi Engineering and Economics Institute, Mustakillik 225, Karshi, Kashkadarya region, 180100, UzbekistanU A PardayevichKarshi Engineering and Economics Institute, Mustakillik 225, Karshi, Kashkadarya region, 180100, UzbekistanO YunusKarshi Engineering and Economics Institute, Mustakillik 225, Karshi, Kashkadarya region, 180100, Uzbekistan
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Аннотация
Abstract In this work, the structure and properties of heteroepitaxial and multilayer thin film systems obtained by thermal diffusion, MBE, and ion implantation have been comprehensively studied created.
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