Sputtering of GaAs target under Bi+ cluster ions bombardment
Sh.Dj. AkhunovInstitute of Ion-Plasma and Laser Technologies, Uzbekistan Academy of Sciences, Durmon Yoli Street 33, 100125 Tashkent UzbekistanG.P. KakhramonovaSh.M. AxmedovB.Sh. KasimovDilshadbek T. Usmanov
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atomsjournal2022en
ABI
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