Controlling the Low-temperature Ionic Purification of a Silicon Surface by Electron Spectroscopy
U. B. Sharopov“Solar Thermal and Power Plants” Laboratory, Physical-Technical Institute, Uzbekistan Academy of Sciences, Chingiz Aitmatov St., 2, 100084, Tashkent, UzbekistanKulwinder KaurDepartment of Applied Sciences, PEC University of Technology, Chandigarh, 160012, IndiaМ. К. КурбановUrgench State University, 220100, Urgench, UzbekistanDilmurod SaidovUrgench Branch of Tashkent University of Information Technologies, 220100, Urgench, UzbekistanE. T. Juraev“Solar Thermal and Power Plants” Laboratory, Physical-Technical Institute, Uzbekistan Academy of Sciences, Chingiz Aitmatov St., 2, 100084, Tashkent, UzbekistanMirkomil Sharipov“Solar Thermal and Power Plants” Laboratory, Physical-Technical Institute, Uzbekistan Academy of Sciences, Chingiz Aitmatov St., 2, 100084, Tashkent, Uzbekistan
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