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Comparative research fluorine and colloidal aggregate formation on the surface lithium fluoride thin films during electronic, ionic and thermal treatments

Utkirjon SharopovNational Scientific Research Institute of Renewable Energy Sources, Ministry of Energy of the Republic of Uzbekistan, Tashkent, UzbekistanAbduzokhidkhuja AbdusalomovNational Scientific Research Institute of Renewable Energy Sources, Ministry of Energy of the Republic of Uzbekistan, Tashkent, UzbekistanAlisher KakhramonovNational Scientific Research Institute of Renewable Energy Sources, Ministry of Energy of the Republic of Uzbekistan, Tashkent, UzbekistanK. Yu. RashidovPhysical-Technical Institute, Uzbekistan Academy of Sciences, Tashkent, UzbekistanFeruza AkbarovaPhysical-Technical Institute, Uzbekistan Academy of Sciences, Tashkent, UzbekistanSitora TurapovaInstitute of Materials Science, Uzbekistan Academy of Sciences, Tashkent, UzbekistanМ. К. КурбановUrgench State University, Urgench, UzbekistanDilmurod SaidovUrgench Branch of the Tashkent University of Information Technologies, Urgench, UzbekistanБ. Э. ЭгамбердиевА. S. KomolovSt Petersburg State University, St Petersburg, RussiaS. A. PshenichnyukInstitute of Molecule and Crystal Physics, Russian Academy of Sciences, Ufa, RussiaKulwinder KaurHanna BandarenkaBelarusian State University of Informatics and Radioelectronics, Minsk, Belarus
Vacuumjournal2023en
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