S.A. Lem
2 та иш
Tashkent State Technical University, Universitetskaja 2, Tashkent 700095, Uzbekistan
The radiation stimulated diffusion role in high dose, low energy, high temperature ion implantation
S.H. Valiev, T.S. Pugacheva, F.G. Jurabekova +2
МақолаSilicon and Solar Cell TechnologiesNuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms19971 иқтибосABI